AeroBar® 5225 Ionizing System
Simco-Ion’s Model 5225 Digital AeroBar with Software Control is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, E78 compliance at the most stringent levels can be achieved.
- Complete integration with tool control system
- Fully adjustable parameters for each AeroBar
- Ion current monitoring
- Several lengths available including 3 specifically designed for EFEMs
- Single-crystal silicon emitter points
Specifications
Input Voltage 24 VAC, 50/60 Hz, 1W (typ), received from the Interface Module Ion Emission Pulsed DC, Steady-state DC or standby Emitter Points Single-crystal Silicon, replaceable Cleanliness ISO 14644-1 Class 1 Dimension 2.1H x 1.2W x 22.4, 28.4, 35.7, 44.4, 55.6, 64.4, 75.5, or 84.4L in.
(5.3H x 3.1W x 56.9, 72.1, 90.7, 112.8, 141.2, 163.6, 191.8, or 214.4 L cm)Weight 1.5 lb (1.02 kg) for a 22 in (56.9 cm) bar (approx. 6 oz per additional ft/0.17 kg per additional 30 cm) Accessories
- Wire Terminal Connector
- Wire Ties
- Tie Blocks
- Interconnect Cables
- CPC Cables
- Standard AeroBar Installation Kit
- Pine Tree Clips
- Eyebolt with nut
- Mid-Clips
- Wire Clip
- Flat Clip
- Stainless steel T-Bar Clip
Consumables
- Ultra-clean Sleeved (Silicon) Emitter Point
- Simco-Ion Emitter Point Cleaner
- Polycarbonate Rods
Target Markets
- Back-End Semiconductor Processing
- Front-End Semiconductor Manufacturing
Target Applications
The AeroBar 5225 is designed to control electrostatic discharge and particle contamination in mini-environments and workstations and in locations where forced-air is not favored and usually work in cleaner environment with laminar flow.