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Novx 7000

Novx 7000

The Novx Series 7000 Process Monitoring System is a multi-purpose microprocessor-based instrument for monitoring critical electrostatic related parameters in workstation and process environments. The six dedicated channels customize the instrument for the monitoring field voltage detection/ionizer balance, ESD event, body voltage detection or ground monitoring and particle counting.
  • Smart Signal Processing
  • Multiple sensor and antenna styles
  • Daisy chainable; RS-485 or Ethernet output
  • ESD event detection tracking
  • Three options for field voltage monitoring
  • User-programmable alarm set-points with automated messaging
  • Closed-loop control to tool computer
  • Plug-in modules allow factory upgrades

  • Specifications

    Field Sensing  
    Input Voltage ±15 - ±5000V
    Output Voltage 0 - ±5.0
    Accuracy ±1V for <20V; ±5% for >20V 
    ESD Event Detection CDM / HBM
    Particle Counter Interface Data Acquisition
    Body Voltage Detection   
    Applied Voltage <0.5V
    Accuracy ±0.5V 
    GND Monitoring  
    Range 1-20 ohms
    Applied Voltage <0.5V
    Accuracy 0.5 ohms 
    General  
    Dimension 2.7W x 7H x 5.5D in. (6.9 x 17.8 x 14 cm)
    Weight 2.5 lb (1.4 kg)

  • Accessories

    • Mounting Bracket
    • Passive Antennas
    • Cable Assembly for Ionizer Feedback
    • Cable Adapter
    • Micro ESD Antennas
    • Micro ESD Directional Antenna
    • RS-485 Board
    • RJ Interface Cable
    • Ethernet Board
    • Cat 5e with RJ-45 Ethernet Cable

  • Related Products

    5802i Benchtop 
    Ionizing Blower5810i Overhead
    Ionizing Blower5822i In-tool
    Ionizing BlowerCal_reader 
    Instrument Calibrator

  • Documents

    Novyx 7000 Datasheet

    Ionization for Life Science Manufacturers Brochure

    Static Control for Semiconductor Manufacturing Brochure

    Model 5802i Critical Environment Bench-top Blower Datasheet

    Model 5810i Critical Environment Overhead Blower Datasheet

     

  • Target Markets

    • Electronics Manufacturing
    • Life Sciences
    • Back-end Semiconductor Processing
    • Front-end Semiconductor Processing
    • Flat-panel Display

  • Target Applications

    The Novx 7000 System enables monitoring for critical electrostatic variables in both front-end and back-end semiconductor manufacturing environments. The multi-function sensing capability and industrial communication abilities enable integration of real-time monitoring with process electrostatic control. As a general tool for electrostatic monitoring of ESD events, electrostatic fields, particle density, personnel and workstation grounding, and the ability to control ionizer balance and discharge parameters, it also enhances monitoring uses in FPD, disk-drive and medical manufacturing applications.

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